Abstract: This paper introduces a signal detection method for a dual-stator axial electrostatic micromotor control system based on a suspended rotor microgyroscope. It is particularly important for realizing closed-loop control of the suspended rotor rotation drive. Its main feature is the use of cross-correlation detection-lock-amplification and DSP control direct digital frequency synthesis (DDS) to generate sine waves. The feasibility of this method is verified by actual sine wave generation circuit and system simulation. These methods provide solutions to some key problems in the actual circuit implementation of micro capacitance detection and provide important references for the selection of actual circuit parameters. Keywords: electrostatic micromotor, cross-correlation detection, direct digital frequency synthesis, lock-amplification 0 Introduction Micromotors, as the main power source and key execution component of microelectromechanical systems (MEMS), have both driving and precision control functions. They have broad application prospects in joint driving of micro robots, micro optical discs, disk drives, micro inertial devices and micro aerospace instruments. Their research is one of the hot topics in MEMS research [1,2]. The main driving methods of micromotors [2] include electrostatic, electromagnetic, super magnetostrictive, piezoelectric and shape memory alloy types. Electrostatic motors can be divided into linear and rotary types according to their operation mode. Rotary electrostatic motors can be further divided into axial drive type, side drive type and oscillating type [2]. There are two operating principles of electrostatic motors [1]: one is based on the dielectric relaxation principle, and the other is based on the variable capacitance principle. The research object of this paper is a dual-stator electrostatic micromotor based on a suspended rotor micro-gyroscope, which belongs to the axial drive type variable capacitor synchronous electrostatic micromotor. 1 Electrostatic micromotor structure As shown in Figure 1, the structure of the electrostatic micromotor includes an upper stator, a salient pole rotor and a lower stator. Common capacitor plates, torque feedback capacitor plates and rotating capacitor plates are distributed on the surfaces of the upper and lower stators. For details, please click: Research on signal detection of dual-stator electrostatic micromotor control system