Abstract : To achieve dynamic measurement of hydraulic systems and provide a theoretical basis for hydraulic system design and fault diagnosis, this paper further optimizes the structural dimensions of a novel MEMS flow sensor based on its design, and performs static calibration on the MEMS core and the optimized MEMS sensor. Dynamic characteristic tests on the MEMS sensor reveal that the novel MEMS sensor exhibits low disturbance and high frequency response, making it suitable for dynamic measurement of hydraulic systems. Keywords : MEMS sensor; size optimization; static calibration; dynamic test Introduction The research focus of modern hydraulic technology has shifted from static characteristics to dynamic characteristics. Past experience has shown that systems with perfect static characteristics often experience vibration and noise problems after operation, mainly due to the lack of research on the system's dynamic characteristics. For various purposes, many studies have been conducted on the dynamic characteristics of pipelines both domestically and internationally. Due to the complexity of the external manifestations and internal mechanisms of unsteady flow oil, many problems remain unsolved. Currently, many hydraulic system designs and analyses can only be performed based on steady flow, but in reality, the probability of unsteady flow in a system is no less than that of steady flow. Therefore, researching and improving the dynamic performance of sensors is of great significance for realizing dynamic measurement of hydraulic systems. (Full text available for download: MEMS Sensor Optimization and Dynamic Testing)