Developed countries worldwide place great emphasis on sensor technology development, considering it a key technology related to national security, economic development, and technological progress, and incorporating it into their national science and technology development strategies. Consequently, sensor technology has developed rapidly in recent years, with more in-depth and extensive research into new sensor principles, materials, and technologies. New sensor varieties, structures, and applications are constantly emerging. The rapid miniaturization is particularly noteworthy. With the increasing maturity of integrated microelectromechanical processing technology, sensor fabrication technology has entered a new stage of development. The combination of microelectronics and micromechanical technologies has led to the evolution of device structures from two-dimensional to three-dimensional, achieving further miniaturization and low power consumption. Research is underway to insert sensors into the human body, into blood vessels, and to develop miniature sensors for measuring molecular weight and DNA gene mutations. The increasingly sophisticated functionality, driven by the rapid development of integrated micro-optical-mechanical-electrical systems technology and the application of new technologies such as optical fibers, superconductors, nanotechnology, and smart materials, further integrates and intelligentizes information acquisition, transmission, and processing. More new sensors will possess self-calibration, range switching, calibration, and data processing functions, further enhancing and improving sensor functionality, performance, and sensitivity and reliability. The pace of research into biological and chemical sensors has accelerated in the new century. Globally, research in life sciences has accelerated, with greater emphasis placed on the environment for human survival. The research and development of novel biological and chemical sensors has become a key focus and hot topic. For human health, various DNA sensors, protein chips, cell chips, and integrated laboratory-on-chips (μTAS) are currently under development. New sensors urgently needed for monitoring air and water pollution are also being developed to replace current bulky and cumbersome detection systems. The prospects for commercialization and industrialization are broad. While researching and developing new sensors, attention is paid to the simultaneous development of fundamental technologies such as new materials, design methods, production processes, testing technologies, and supporting instruments. Greater emphasis is placed on practicality, thus ensuring faster technology transfer and industrialization. Innovation is more prominent. Because the research and development of new sensors is often relatively recent and still immature, it contains more opportunities for innovation, leading to fierce competition and more intellectual property rights for the results. Therefore, accelerating the research, development, and application of new sensors is of greater significance. The focus of new sensor development is on novel microsensors based on MEMS technology. Microsensors (a general term for sensors with dimensions ranging from a few micrometers to a few millimeters), especially those based on MEMS (Micro-Electro-Mechanical Systems) technology, have gradually become practical, and this is one of the key areas for future development. The concept of micromechanics was first proposed in 1959, and since then, the enormous potential of using MEMS technology to manufacture various novel miniature sensors, actuators, and microsystems has become increasingly apparent. This research has enormous application prospects in various fields such as industry, agriculture, defense, aerospace, navigation, medicine, bioengineering, transportation, and home services.