MEMS refers to miniature devices or systems that can be mass-produced and integrate micro-mechanisms, micro-sensors, micro-actuators, signal processing and control circuits, and even interfaces, communication and power supplies onto one or more chips.
Sensors manufactured using MEMS technology are characterized by miniaturization, integration, low cost, high efficiency, and mass production capability. Furthermore, MEMS sensors not only sense the measured parameters and convert them into easily measurable signals, but they can also analyze, process, identify, and judge the obtained signals; therefore, they are figuratively called intelligent sensors.
In 1980, the first MEMS sensor was introduced. Since then, MEMS sensors for weight, humidity, accelerometers, pressure, microphones, and many others have emerged, and they are generally classified into three main categories: MEMS physical sensors, chemical sensors, and biological sensors. See the diagram below for details:
