[b][align=center]The Research of the Large Travel and High Precision Two-Level Table WANG Li-song, SU Bao-ku, DONG Shen, ZHANG Jing (Harbin Institute of Technology, Harbin 15000i, China)[/align][/b] Abstract : This paper studies the control technology of a coordinating positioning table with macro-micro two-level drive. The coordinating table uses a linear motor for large displacement drive to ensure a long working stroke and fast response speed, while an electrostrictive micro-displacement device is used for precision position drive. A single-frequency laser interferometer is used to realize closed-loop position feedback. The system is applied in practice and can achieve a repeatability accuracy of less than 0.02µm within a working stroke of 500mm. Keywords: linear motor; electrostrictive micro-displacement device; single-frequency laser interferometer A linear motor and a pieoelectric actuator were adopted to drive the table. By using feedback control technology, the accuracy of the system was controlled to be smaller than 0.02 μm, and the tray of the system was 500 mm. Keywords : Linear motor; Pie-electromechanical actuator; Single frequency laser interferometer. The manufacturing and testing of micro-electromechanical systems, the production of large-scale integrated circuits, ultra-precision machining and precision measurement all rely on ultra-precision positioning technology, which has become one of the key technologies in the field of precision engineering. Traditionally, a combination of AC or DC servo motors and ball screws is used to achieve linear feed. However, due to the backlash and elastic deformation in the transmission links, it is difficult for this type of system to achieve high precision. An electrostrictive micro-displacement actuator is used to drive the linear worktable. Using closed-loop feedback control technology, nanoscale ultra-precision positioning can be easily achieved. However, since the maximum working range of the electrostrictive micro-displacement actuator is only tens of micrometers, this control method cannot achieve large stroke. To solve the contradiction between large stroke and high precision... This study employs a two-level positioning control method, using a macro positioning system with lower positioning accuracy to achieve large-scale program positioning. Positioning errors are compensated for by a high-precision micro positioning system, resulting in high positioning performance and fast response speed, while significantly reducing the system's structural complexity. [b][align=center]For details, please click: Research on Control Method of Large-Stroke High-Precision Two-Level Positioning Worktable[/align][/b]