Abstract : To achieve high-speed and high-precision tracking in ultra-precision machine tools, a finite-bandwidth expectation model utilizing future information is proposed. The amplitude-frequency response of this model is 1 within the expectation frequency band and 0 in other frequency bands, with a constant phase lag of zero across all frequency bands. In the system design, a controller with feedback and feedforward compensation is used to approximate this model. Applying this controller to a practical system, a control accuracy of no more than ±25nm is obtained when tracking a sinusoidal signal. Keywords: Ultra-precision machine tool; Finite-bandwidth expectation model; Servo system; Oscillating mode Ultra-precision machine tools are crucial foundational equipment for advanced manufacturing technologies. With economic development, not only are the shapes of workpieces becoming more complex, but higher demands are also placed on the productivity and precision of machine tools. The servo system of ultra-precision machine tools is a major factor determining the machining accuracy and speed. Currently, the control of machine tool servo systems generally employs the traditional PID method. This method designs the controller based on the deviation between the present and past times, completely ignoring the known future path information during part machining. Control systems corrected using the PID method generally exhibit significant phase lag at high frequencies. Since servo systems are highly sensitive to phase lag in their tracking errors, this leads to substantial tracking errors during high-speed machining, degrading the surface quality of parts. Theoretically, incorporating known future path information into the controller design process can yield better control performance. This paper, considering the characteristics of the HCM-I ultra-precision machine tool, studies a high-speed, high-precision control method for ultra-precision machine tools based on a finite bandwidth expectation model, utilizing future path information. [b]1 Inverse System Design Method and Finite Bandwidth Expectation Model 1.1 Inverse System Design Using Future Information[/b] [b][align=center]For more details, please click: Research on Servo Tracking Control of Ultra-Precision Machine Tools Based on Finite Bandwidth Expectation Model[/align][/b]